機器情報	メーカー名: OLYMPUS 性能: The machine is designed for nanometer level height imaging and roughness measurement. 【 Specifications】 [LSM Section] ●Light Source: 405 nm Semiconductor Laser ●Detector: Photomultiplier ●Total Magnification: 108x - 17,280x [Planar Measurement] ●Repeatability: 100x: 3σn-1=0.02 μm ●Accuracy: Measurement Value ±2% [Height Measurement] ●System: Revolving Nosepiece Vertical-drive System ●Stroke: 10 mm ●Scale Resolution: 0.8 nm ●Display Resolution: 1 nm ●Repeatability: 50x: σn-1=0.012 μm ●Accuracy: 0.2+L/100 μm or less (L=Measuring Length μm) [Color Observation Section] ●Light Source: White LED ●Detector: 1/1.8-inch 2-megapixel Single-panel CCD ●Digital Zoom: 1x – 8x ●Revolving Nosepiece: Motorized BF Sextuple Revolving Nosepiece ●Differential Interference Contrast Unit Differential Interference Contrast Slider: U-DICR, Polarizing Plate Unit Built-in ●Objective Lens: BF Plan Semi-apochromat 5x, 10x, LEXT-dedicated Plan Apochromat 20x, 50x, 100x ●Z Focusing Unit Stroke: 100 mm ●XY Stage: 100x100 mm (Motorized Stage) 設置場所: 301 at I2CNER buildingⅡ その他:
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サポート情報	営業担当者等:
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機器の管理者	masamichi_nishihara

[Contact]
Dr. M. Nishihara Ext. 90-6741(Ito Campus)
nishihara.masamichi.064@m.kyushu-u.ac.jp