Secondary Ion Mass Spectrometry/PS02B11 [ Other rooms ]
Detail information
Equipment information |
Maker: ION-TOF社/ION-TOF Specs: Time-of-Flight secondary ion mass spectrometry (TOF-SIMS) is a very sensitive surface analytical technique, well established for many industrial and research applications. It provides detailed elemental and molecular information about the surface, thin layers, interfaces of the sample, and gives a full three-dimensional analysis. The use is widespread, including semiconductors, polymers, paint, coatings, glass, paper, metals, ceramics, biomaterials, pharmaceuticals and organic tissue. [Specifications] ●Vacuum system: Base pressure reached after bakeout < 6.7 x 10-8 mbar ●EDR Analyser: Mass resolusion >10,000 (29amu) M/△M FWHM ●Bi Cluster Ion Gun ●measurement range: μm2 - cm2 Location: 101, I2CNER BuildingⅠ Other information: |
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Person in charge | atsushi_takagaki |
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[Contact]
Prof. A. Takagaki Ext. 90-6711 (Ito Campus)
atakagak@cstf.kyushu-u.ac.jp
Prof. A. Takagaki Ext. 90-6711 (Ito Campus)
atakagak@cstf.kyushu-u.ac.jp
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