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3D Measuring Laser Microscope/OLS4000-SAT [ -1 ]

Detail information

Equipment information Maker:
OLYMPUS

Specs:
The machine is designed for nanometer level height imaging and roughness measurement.

【 Specifications】
[LSM Section]
●Light Source: 405 nm Semiconductor Laser
●Detector: Photomultiplier
●Total Magnification: 108x - 17,280x
[Planar Measurement]
●Repeatability: 100x: 3σn-1=0.02 μm
●Accuracy: Measurement Value ±2%
[Height Measurement]
●System: Revolving Nosepiece Vertical-drive System
●Stroke: 10 mm
●Scale Resolution: 0.8 nm
●Display Resolution: 1 nm
●Repeatability: 50x: σn-1=0.012 μm
●Accuracy: 0.2+L/100 μm or less (L=Measuring Length μm)
[Color Observation Section]
●Light Source: White LED
●Detector: 1/1.8-inch 2-megapixel Single-panel CCD
●Digital Zoom: 1x – 8x
●Revolving Nosepiece: Motorized BF Sextuple Revolving Nosepiece
●Differential Interference Contrast Unit
Differential Interference Contrast Slider: U-DICR, Polarizing Plate Unit Built-in
●Objective Lens: BF Plan Semi-apochromat 5x, 10x, LEXT-dedicated Plan Apochromat 20x, 50x, 100x
●Z Focusing Unit Stroke: 100 mm
●XY Stage: 100x100 mm (Motorized Stage)


Location:
301 at I2CNER buildingⅡ

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Person in charge masamichi_nishihara

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[Contact]
Dr. M. Nishihara Ext. 90-6741(Ito Campus)
nishihara.masamichi.064@m.kyushu-u.ac.jp

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